| 摘要 |
PURPOSE: A spin coating apparatus is provided to uniformly maintain the quantity of induced air, by automatically turning on/off an air control unit for inducing air from the exterior such that the air control unit is correspondingly coupled to a cover having a penetration hole. CONSTITUTION: A cover unit(21) supplies an inner space capable of being coated, detachably coupled to a case(22). A substrate(200) to coat is mounted on a chuck(23) installed in the inner space. A drive unit can rotate the substrate at a desired speed, coupled to the chuck. An exhaust path(28) supplies a path for exhausting gas remaining in the inner space, installed in a predetermined portion of the case. An air control unit automatically controls the gas induced from the exterior, installed in the cover. An air controller(29) is screw-coupled to the penetration hole formed in the cover. A valve unit(210) induces air from the exterior, connected to the air controller. A cylinder selectively turns on/off the valve unit. The air control unit is composed of the air controller, the valve unit and the cylinder.
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