| 摘要 |
<p>A top ring (30) is mounted on a carrier plate (24), in which the workpiece (20) is adhered on a lower face (26), so as to press the workpiece (20) onto the abrasive face (12). A driving mechanism (80) relatively moves the abrasive plate (10) with respect to the top ring (30) so as to abrade the surface (22) of the workpiece (20). A ring groove (32,34) is formed in a lower face (31) of the top ring (30). An elastic ring member (52,54) is fixed on the lower face (31) of the top ring (30) and covering over the ring groove (32,34). The elastic ring member (52,54) is capable of contacting an upper face (25) of the carrier plate (24). A communicating path (66,68) is communicated to a ring chamber (62,64), which is formed between the ring groove (32,34) and the elastic ring member (52,54). A fluid supplying unit (72,74) supplies a fluid to the ring chamber (52,54) and adjusting fluid pressure therein. <IMAGE></p> |
