METHOD AND APPARATUS FOR PURIFYING GAS CONTAINING SILOXANE COMPOUND

摘要

PROBLEM TO BE SOLVED: To provide a method for purifying a gas containing a siloxane compound by which the purified gas is inexpensively and efficiently obtained by removing the siloxane compound in the gas containing the siloxane compound. SOLUTION: This method for purifying the gas containing the siloxane compound is characterized in that the gas containing the siloxane compound is allowed to pass through a packed layer with a packed porous adsorbent to allow the adsorbent to adsorb the siloxane compound in the gas containing the siloxane compound to remove the siloxane compound included in the gas and to provide the objective purified gas. The gas containing the siloxane compound is preferably passed through the packed layer at <=0.5 m/s superficial velocity. The porous adsorbent packed in the packed layer preferably has >=500 m2/g specific surface area, and >=0.1 cm3/g accumulated volume of pores within 10-20Ådiameters.