发明名称 Method for making flash memory with UV opaque passivation layer
摘要 A method for making a flash memory having a passivation layer that is not transparent to ultraviolet light. The method comprises forming a semiconductor substrate that includes a flash memory cell having a floating gate, then forming a conductive layer on the substrate. Process induced charge that has accumulated on the flash cell floating gate is then neutralized and a passivation layer, which is not transparent to ultraviolet light, is formed on the conductive layer.
申请公布号 US6350651(B1) 申请公布日期 2002.02.26
申请号 US19990330257 申请日期 1999.06.10
申请人 INTEL CORPORATION 发明人 WADA GLEN;GIRIDHAR R. V.;OZZELLO ANTHONY
分类号 H01L21/28;H01L23/552;(IPC1-7):H01L21/336 主分类号 H01L21/28
代理机构 代理人
主权项
地址