| 摘要 |
PROBLEM TO BE SOLVED: To provide a wafer cassette and a wafer cassette hanger which can be used put wafers in and take it out sideways in a space whose upper dimension is not sufficient. SOLUTION: In a wafer cassette hanger 1 for holding a wafer cassette 11, in which two side plates 13 each having grooves are connected counterposed, when a pusher 4 mounted on a holding member is pressed, a pair of chucks 5 are opened by the operation of a connection section 8. The hanger 1 is made to descend from above the cassette 11 with the cassette 5 opened; cassette- holding pins 6 are positioned so as to be moved below pins 12; and the pusher 4 is released, thereby the chucks 5 are closed, and the cassette can be carried with the pins 12 supported by the pins 6. Since the holding member 3 is positioned on the side of the cassette 11, the cassette can be put into the small space sideways. |
