| 发明名称 |
SMART LOAD PORT WITH INTEGRATED CARRIER MONITORING AND FAB-WIDE CARRIER MANAGEMENT SYSTEM |
| 摘要 |
A system is disclosed capable of monitoring a plurality of performance characteristics of a wafer carrier on a load port, and to a system for managing carrier operation on a fab-wide basis. |
| 申请公布号 |
WO0215234(A2) |
申请公布日期 |
2002.02.21 |
| 申请号 |
WO2001US25344 |
申请日期 |
2001.08.14 |
| 申请人 |
ASYST TECHNOLOGIES, INC. |
发明人 |
MARTIN, RAYMOND, S. |
| 分类号 |
H01L21/66;H01L21/00;H01L21/02;H01L21/673;H01L21/677 |
主分类号 |
H01L21/66 |
| 代理机构 |
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代理人 |
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