STATIC PRESSURE GAS BEARING

摘要

PROBLEM TO BE SOLVED: To provide a static gas pressure bearing of excellent vibration damping characteristics. SOLUTION: This static pressure gas bearing utilizes a cylindrical small hole of diameter between 0.04 mm and 0.4 mm as a gas jetting out member and is provided with a helium gas supply device jetting helium gas out from the small hole. The diameter and the length of the small hole are defined as D and L respectively, and a bearing shows excellent vibration damping characteristics when D4/L is below 2×10-4 mm3.