| 摘要 |
PROBLEM TO BE SOLVED: To provide an acceleration sensor having high resolution and a wide measurable range and hardly influenced by temperature or the like. SOLUTION: In this acceleration sensor, two fixing parts 1 mounting holes 2 are provided on two fixing parts 1, and plate springs 3 are provided on the fixing parts 1, respectively, to constitute a cantilever by the two parallel plate springs 3. Both ends of a weight 4 are supported by the two plate springs 3, and a refraction grating plate 5 having a refraction grating is stuck to the surface of the weight 4. A laser beam is projected to the refraction grating plate 5 by an encoder to measure the displacement of the weight 4. |
