Laminated manifold for microvalve

摘要

The manifold (10) can be used to distribute a fluid to and from a microvalve (19). The manifold includes a first plate (12) having a groove (28) formed in one face (30) thereof. A second plate (14) is fixed to the first plate so as to cover the groove to form a fluid passage through the groove. First (18) and second (36) bores are formed through at least one of the first plate and the second plate to form an inlet and an outlet, respectively, of the fluid passage. According to a method of manufacturing, etching the first plate (12) forms the groove (28). Preferably, an etching process also forms the first and second bores (18,36). Also, preferably, the first plate (12) is one of a plurality of plates (12,14,50,60,68) formed from a single sheet of material (74). Preferably the sheet of material (74) is a standard sized sheet with locating indicia (82) enabling assembly of the manifold with standard pick and place equipment. Specifically, a method of assembling the manifold includes forming a plurality of first plates (12) from a single sheet; a plurality of second plates (14) from a second sheet; applying a braze material (40) to selected portions of one of the first and second sheets; clamping the sheets together with each of the first plates aligned with a corresponding one of the second plates; heating the first and second sheets, and braze material (40) therebetween, to braze each of the first plates to the corresponding one of the second plates to form a manifold; detaching each manifold from the first and second sheets; and assembling the manifold to a fluid circuit. Optionally, a microvalve (19) is attached to each manifold before the manifold is detached from the first and second sheets.