| 摘要 |
PROBLEM TO BE SOLVED: To further improve a method for recycling an organometallic compound for MOCVD(Metal Organic Chemical Vapor Deposition) in which an unreacted organometallic compound is extracted from a used raw material having been subjected to a CVD stage and is recycled and to provide a method for efficiently extracting an organometallic compound of higher purity. SOLUTION: In this method for recycling an organometallic compound for MOCVD in which an unreacted organometallic compound is extracted from a used raw material having been subjected to a thin film deposition stage, the used raw material is subjected to modifying treatment, and after that, the unreacted organometallic compound is extracted; wherein, as the method for subjecting the used raw material to the modifying treatment, either a method in which the used raw material is brought into contact with a hydrogenation catalyst or a reducing agent or a method in which the used raw material is brought into contact with any of halogen, hydrogen halide, inorganic acid, alkene and diene is adopted. Moreover, at this time, by bringing the used raw material into contact with a decolorizer composed of activated carbon, silica and activated clay, an organometallic compound for MOCVD of higher purity can be recycled.
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