ELECTROSTATIC INK JET HEAD, ITS MANUFACTURING METHOD, AND IMAGING APPARATUS COMPRISING IT

摘要

PROBLEM TO BE SOLVED: To provide an electrostatic ink jet head in which ink can be controlled accurately by means of a diaphragm. SOLUTION: The electrostatic ink jet head comprises a nozzle for ejecting an ink liquid drop, a liquid chamber 302 of silicon having a channel for filling ink, and a diaphragm 305 of silicon formed at a part of the liquid chamber 302 wherein a pressure wave is generated in the ink filling the liquid chamber 302 by driving the diaphragm 305 through electrostatic attraction to an electrode 307 disposed oppositely to the diaphragm 305 through a constant gap and an ink liquid drop is ejected from the inside of the liquid chamber 302. A thin metal film or a film of metal oxide or metal nitride is formed on the surface of the diaphragm 305 on the liquid chamber 302 side and a linear recess 304 is made in the surface of the diaphragm 305 on the side opposite to the liquid chamber 302.