发明名称 CRYSTAL SUBSTRATE
摘要 PROBLEM TO BE SOLVED: To provide a crystal substrate having a large diameter, inexpensive and excellent in the heat-radiating property. SOLUTION: This crystal substrate having a large diameter, inexpensive and excellent in the heat-radiating property is obtained by using a polycrystalline SiC substrate 2 whose surface is oriented in the [111] axis direction and then growing a group III nitride single crystal 1 on the polycrystalline SiC substrate 2.
申请公布号 JP2002053398(A) 申请公布日期 2002.02.19
申请号 JP20000240383 申请日期 2000.08.03
申请人 HITACHI CABLE LTD 发明人 SHIBATA MASATOMO;OI YOSHIO
分类号 C30B29/38;C30B19/12;H01L21/205;H01L21/208;H01L33/16;H01L33/32;H01L33/34 主分类号 C30B29/38
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