Interface unit for a tester and method of connecting a tester with a semiconductor device to be tested

摘要

Contact ring, which is brought into contact with a probe card having tungsten needles, has a multiplicity of POGO pins on its one surface facing the probe card. The contact ring has, on another surface opposite to the one surface, press-fitting sockets electrically connected with the POGO pins. Motherboard has sockets similar in construction to the press-fitting sockets of the contact ring. Coaxial cables each have press-fit terminals that are press-fittable in one of the sockets of the contact ring and in one of the sockets of the motherboard, and thereby these coaxial cables electrically connect the contact ring with the motherboard. Because the contact ring and the motherboard are electrically connected with each other by the press-fit engagement alone, there are encountered no inconveniences due to the conventional soldering-based connection.