| 发明名称 |
Method for determining metal concentration in a field area |
| 摘要 |
The concentration of metal atoms in a field area between two trench structures is determined by applying a voltage on one of the trench structures and grounding the other. The resultant current flow between the trench structures is measured and used as an indicator of metal concentration in the field area.
|
| 申请公布号 |
US6348701(B1) |
申请公布日期 |
2002.02.19 |
| 申请号 |
US19990421455 |
申请日期 |
1999.10.19 |
| 申请人 |
ADVANCED MICRO DEVICES, INC. |
发明人 |
JOO YOUNG-CHANG;MARATHE AMIT P. |
| 分类号 |
H01L21/66;(IPC1-7):H01L23/58 |
主分类号 |
H01L21/66 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
