发明名称 |
Method of providing yield management services employing the internet |
摘要 |
A method providing yield management services employing the Internet includes receiving information from a number of wafer yield loss sources over the Internet; processing the information to identify a pattern of defects in wafers; and determining corrective action in light of the pattern to enhance wafer yields. The method is employable in both single client and multi-client systems. |
申请公布号 |
AU7715401(A) |
申请公布日期 |
2002.02.18 |
申请号 |
AU20010077154 |
申请日期 |
2001.07.24 |
申请人 |
HEURISTIC PHYSICS LABORATORIES, INC. |
发明人 |
YERVANT D. LEPEJIAN;JOHN M. CAYWOOD;VICTOR H. OKUMOTO |
分类号 |
G06Q10/00 |
主分类号 |
G06Q10/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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