发明名称 Method of providing yield management services employing the internet
摘要 A method providing yield management services employing the Internet includes receiving information from a number of wafer yield loss sources over the Internet; processing the information to identify a pattern of defects in wafers; and determining corrective action in light of the pattern to enhance wafer yields. The method is employable in both single client and multi-client systems.
申请公布号 AU7715401(A) 申请公布日期 2002.02.18
申请号 AU20010077154 申请日期 2001.07.24
申请人 HEURISTIC PHYSICS LABORATORIES, INC. 发明人 YERVANT D. LEPEJIAN;JOHN M. CAYWOOD;VICTOR H. OKUMOTO
分类号 G06Q10/00 主分类号 G06Q10/00
代理机构 代理人
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