| 摘要 |
PROBLEM TO BE SOLVED: To provide a metal vapor laser device for controlling a discharge tube temperature rapidly, safely, and reliably. SOLUTION: The metal vapor laser device 1 supplies a pulse voltage of 20 kV with a repeating frequency of 0.5 kHz, for example, in 45 minutes after a high-voltage pulse with a specific repeating frequency where the frequency has been changed appropriately by a repeating frequency-control device 25 is subjected to power supply failure, re-applies a pulse voltage of 20 kV with a repeating frequency of 0.2 kHz in additional 75 minutes, and safely turns off power when the temperature of the discharge tube reaches approximately 200 deg.C. |
