PHOTOELECTRON SPECTROMETRY DEVICE AND METHOD

摘要

PROBLEM TO BE SOLVED: To provide a photoelectron spectrometry method and device enabling accurate analysis of a minute region of an insulating sample. SOLUTION: This photoelectron spectrometry device is a photoelectron spectrometer using light with a predetermined wavelength in a wavelength area ranging from soft X-ray to vacuum ultraviolet ray as an excitation source for irradiating the sample formed of an insulating material and detects a photoelectron amount emitted from the sample at every kinetic energy. This photoelectron spectrometer is provided with an analysis area restricting mask, which is arranged on the sample for restricting an analysis area for the insulating material sample and provided with an opening part allowing passage of light and photoelectrons from the excitation source and at least a conductive layer made of a transparent conductive material and formed on the surface, and a direct current power source impressing a predetermined bias voltage to the analysis area restricting mask for separating a signal matching the photoelectron amount emitted from the sample and a signal matching the photoelectron amount emitted from the analysis area restricting mask from each other.