发明名称 FLAW INSPECTION APPARATUS
摘要 PROBLEM TO BE SOLVED: To provide a flaw inspection apparatus capable of easily setting a parameter. SOLUTION: This flaw inspection apparatus 1 is provided with a storage part 20 storing a true answer result representing a true condition related to presence/absence of a flaw in an inspected object 2, an inspection result obtaining part 10 using a prescribed inspection method with a prescribed parameter for obtaining an inspection result related to the presence/absence of flaws in the inspected object 2, an evaluation part 30 comparing the inspection result with the true answer result for obtaining an evaluation result about the validity of the prescribed inspection method with the prescribed parameter, and a parameter changing part 40 changing a parameter value in the prescribed inspection method according to the evaluation result.
申请公布号 JP2002048722(A) 申请公布日期 2002.02.15
申请号 JP20000232704 申请日期 2000.08.01
申请人 DAINIPPON SCREEN MFG CO LTD 发明人 OGI HIROSHI
分类号 G01N21/88;G01N21/956;G06T1/00;H01L21/66 主分类号 G01N21/88
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