| 摘要 |
PROBLEM TO BE SOLVED: To provide a stage device, capable of being used suitably for a TIS measurement of an alignment microscope. SOLUTION: A substrate holder (25) is mounted on a stage (WST) moving in a two-dimensional surface, and the holder holds a substrate (W) by a driver and can rotate at substantially 180 deg. about a prescribed rotating axis perpendicular to the two-dimensional surface. Accordingly, in the case of for example, the TIS measurement of the alignment microscope, it is not necessary to conduct a complicated work of removing the substrate rotating the substrate and then to re-mount the substrate on the holder. In this case, since the rotation of the substrata is conducted, while the substrate is held on the holder, a central positional deviation of the substrate before and after the rotation will not occur. Accordingly, the TIS measurement of the alignment microscope can be executed accurately in a short time.
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