| 摘要 |
PROBLEM TO BE SOLVED: To provide a spiral inductor, having a small area which has the same high Q-value, as viewed from both ends of the inductor. SOLUTION: First and second spirals are formed spirally inwards from a first and a second connection end 10, 11 which are disposed symmetrically about a center line 14 passing the center of the spiral. Within the same turn, the spirals on the same side with the connection ends are formed using the one and the same conductive interconnection layer, while the spirals on the opposite side from the connection end side are formed using other conductive interconnection layer, which is electrically separated by an insulating layer from the conductive interconnection layer. The different conductive interconnection layers are cross-connected through via holes 15 on the center line, with the first and second spirals being formed symmetrically with respect to the center line.
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