METHOD AND DEVICE FOR FORMING THIN FILM,申请号JP19910035924-传众专利搜索

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发明名称	METHOD AND DEVICE FOR FORMING THIN FILM
摘要
申请公布号	JPH04274317(A)	申请公布日期	1992.09.30
申请号	JP19910035924	申请日期	1991.03.01
申请人	NIPPON TELEGR & TELEPH CORP <NTT>	发明人	IKEDA KOICHI;MAEDA MASAHIKO;ARITA MUTSUNOBU
分类号	H01L21/205;H01L21/26	主分类号	H01L21/205
代理机构		代理人
主权项
地址

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