MICROMIRROR ELEMENTS, PACKAGE FOR THE MICROMIRROR ELEMENTS, AND PROTECTION SYSTEM THEREFOR

摘要

A micro-mirror (24) is connected to a substrate (10) via a post (21), a hinge (18c), a post (16c) and metal areas (12a) and an array of the micro-mirrors is disposed in a rectangular shape with a capability of rotation around a switching axis between on and off states corresponding to pixels in a viewed image. Light is directed from a source to the mirrors non-perpendicularly to at least two sides of each mirror, while reflected light is received from collection optics. Independent claims are included for an array of movable micro-mirrors, for a method of positioning an image on a target, for a method of spatially modulating light beams, for an optical micro-mirror element, for a packaged micro-electromechanical device and for a method of making a micro-mirror.