| 摘要 |
The invention relates to a method of manufacturing a master mold (1), which is used to manufacture an optical information disc, such as a CD or DVD. According to the method, a substrate (3) is provided with a photosensitive layer (5), which is subsequently irradiated by means of a radiation beam (7). A liquid, such as water, is supplied into a gap (53) present between the photosensitive layer and an auxiliary lens (59) of the lens system facing said layer. As a result, the size of the scanning spot is decreased and the information density of the information disc to be manufactured is increased. According to the invention, the liquid is supplied via a supply opening (69) which is positioned immediately adjacent the auxiliary lens (59). Thus, the liquid supplied via the supply opening is transported immediately and exclusively into said gap (53), so that the amount of liquid to be supplied to fill the gap is limited. As a result, a homogeneous Couette flow of liquid without air inclusions is obtained in the gap. This Couette flow does not cause any undesirable mechanical vibrations of the lens system. |
