| 摘要 |
The present invention is for a vibration-type micro-gyroscope. The micro-gyroscope according to the present invention has an inner driving gimble and an outer detecting gimble. The inner gimble is driven by electrostatic force and the outer gimble detects variance of capacitance induced by angular velocity. The outer gimble is connected to a fixing axis through a first plate-spring and the inner gimble is connected to the outer gimble through a second plate-spring. |
