发明名称 |
CERAMIC MICROELECTROMECHANICAL STRUCTURE |
摘要 |
A microelectromechanical structure having a ceramic substrate formed from lo w temperature co-fired ceramic sheets. A low loss photodefinable dielectric planarizing layer is formed over one surface of the ceramic substrate. This layer can be a sacrificial layer or a subsequent sacrificial layer added. A photodefined conductor is printed over the low loss dielectric planarizing layer and formed with the sacrificial layer into a structural circuit component. A switch is formed with a biasing actuator and deflectable member formed over the biasing actuator and moveable into open and closed circuit positions. |
申请公布号 |
CA2417352(A1) |
申请公布日期 |
2002.02.14 |
申请号 |
CA20012417352 |
申请日期 |
2001.08.04 |
申请人 |
HARRIS CORPORATION |
发明人 |
GAMLEN, CAROL;RUMPF, RAYMOND;NEWTON, CHARLES |
分类号 |
B81B3/00;H01H59/00;H01P1/12;H05K1/09;H05K3/02;(IPC1-7):B81B3/00;H01H1/00 |
主分类号 |
B81B3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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