| 摘要 |
An ink jet head includes a liquid chamber for containing ink formed in a first substrate, a diaphragm formed in the first substrate, an individual electrode formed on a second substrate, and an active element formed in the second substrate. The individual electrode is formed of a refractory metal and a compound thereof. The active element forms a driving circuit for driving said diaphragm. The diaphragm is deformable by electrostatic force generated between the diaphragm and the individual electrode and exerts restoring force of the diaphragm to pressurize the liquid chamber so that the ink is ejected from the ink jet head.
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