发明名称 |
Cr-containing titanium nitride film |
摘要 |
The invention aims to provide a hard film which is improved in high-temperature corrosion resistance without impairing high sliding characteristics (wear resistance, low frictional coefficient) inherent in a titanium nitride thin film and which is suitable for a slide member such as a bearing or a seal used in rotary machines operated at a high temperature, such as a steam turbine and a gas turbine. For attaining this aim, the invention provides a Cr-containing titanium nitride film which is composed of a nitride containing Ti and Cr as main components, the crystal particles thereof having a face-centered cubic crystal structure, and the crystal thereof being highly oriented toward (200) face.
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申请公布号 |
US2002017235(A1) |
申请公布日期 |
2002.02.14 |
申请号 |
US20010863869 |
申请日期 |
2001.05.24 |
申请人 |
NAGASAKA HIROSHI;KAKUTANI MOMOKO;MIYASAKA MATSUHO;KATAOKA TADASHI |
发明人 |
NAGASAKA HIROSHI;KAKUTANI MOMOKO;MIYASAKA MATSUHO;KATAOKA TADASHI |
分类号 |
C23C14/00;C23C14/06;C23C30/00;(IPC1-7):C30B28/14;C30B23/00;C30B25/00;C30B28/12 |
主分类号 |
C23C14/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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