Wire saw to separate discs from work piece, e.g. to cut semiconductor wafers has work piece holder to fix work piece plate and adjusting unit to align work piece plate flush with work piece holder

摘要

The saw has a work piece holder (3) to hold and fix a work piece plate (4) connected to a work piece (1). An adjusting unit aligns the work piece plate so that the work piece plate and the work piece holder are flush with one another. Preferably, the adjusting unit is a rotation device, whose rotation axis coincides with a rotation axis to position the work piece holder, and which is connected to a manipulator to align the work piece plate. An Independent claim is included for a method to move a work piece in and out of a wire saw.