RADIAL ANTENNA AND PLASMA DEVICE USING IT

摘要

A plasma device comprising a first conduction sheet (31) in which a plurality of slots (36) are formed, a second conduction sheet (32) having a microwave induction inlet (35) and disposed opposite to the first conduction sheet (31), a ring member (34) for joining together the peripheral edges of the first and second conduction sheets (31, 32), and a conductive adjusting member (37) provided on the portion of the second conduction sheet (32) within a radial waveguide formed by the first and second conduction sheets (31, 32), for adjusting distances (d1, d2) up to the first conduction sheet (31), whereby it is possible to obtain a desired electric field radiation distribution without inducing abnormal discharging.