| 摘要 |
A scanning device (37) is positioned above the coated surface of the mask (32) and an optical microscope (34) below. Initially their positions are adjusted until the scanning point (38) of the scanning device is visible in the microscope image, i.e. they are lined up on the ON-axis. Thereafter they are retained in these relative positions whilst the table (33) holding the mask is adjusted in the x,y directions by step motors (41,42) to inspect the mask. |
