SPIN TREATER FOR PLATY WORK AND METHOD FOR SPIN TREATMENT

摘要

PROBLEM TO BE SOLVED: To provide a spin treater wherein the planarity of a large work is kept when a liquid such as a developing agent is fed onto the surface of the work. SOLUTION: A mechanism 16 that supports a work W from the lower side is provided in the position coinciding with each of the four corners of the work W. The mechanism 16 consists of a vertical cylinder 17 secured on a base 10 and a support part 18 that is lifted or lowered by the actuation of the cylinder 17. The rod of the cylinder 17 is inserted into the holes formed on the lower plate 5b and the upper plate 5a so as for its upper end to go beyond the upper plate 5a, and the support part 18 is fixed to the upper end of the rod.