Low cost silicon substrate with impurity gettering and latch up protection and method of manufacture

摘要

A low cost method of manufacturing a silicon substrate having both impurity gettering and protection against CMOS latch up. The method includes performing a low energy implant of a selected acceptor ion to form a low resistivity buried layer closely adjacent the front surface of a silicon wafer. A low energy silicon implant is also performed to create a plurality of gettering sites closely adjacent the front surface. Subsequently, an epitaxial silicon layer is grown on the front surface.