发明名称 Coating method for producing a heat-insulating layer on a substrate
摘要 The invention relates to a component having a substrate and a ceramic heat-insulating layer which is arranged thereon. This heat-insulating layer has a columnar structure having ceramic stems which are essentially oriented mainly normal to the surface of the substrate and have a respective stem diameter of less than 2.5 mum. The invention also relates to a coating apparatus for producing a heat-insulating layer on a substrate and to a method of coating a substrate in the manner of a reactive gas-flow sputtering method.
申请公布号 US6346301(B2) 申请公布日期 2002.02.12
申请号 US20010813259 申请日期 2001.03.20
申请人 SIEMENS AKTIENGESELLSCHAFT 发明人 BEELE WOLFRAM;JUNG THOMAS;BRAND PETER-JOCHEN
分类号 C23C14/00;C23C14/08;C23C14/34;C23C14/38;C23C28/00;(IPC1-7):B05D3/00 主分类号 C23C14/00
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