发明名称 |
Coating method for producing a heat-insulating layer on a substrate |
摘要 |
The invention relates to a component having a substrate and a ceramic heat-insulating layer which is arranged thereon. This heat-insulating layer has a columnar structure having ceramic stems which are essentially oriented mainly normal to the surface of the substrate and have a respective stem diameter of less than 2.5 mum. The invention also relates to a coating apparatus for producing a heat-insulating layer on a substrate and to a method of coating a substrate in the manner of a reactive gas-flow sputtering method.
|
申请公布号 |
US6346301(B2) |
申请公布日期 |
2002.02.12 |
申请号 |
US20010813259 |
申请日期 |
2001.03.20 |
申请人 |
SIEMENS AKTIENGESELLSCHAFT |
发明人 |
BEELE WOLFRAM;JUNG THOMAS;BRAND PETER-JOCHEN |
分类号 |
C23C14/00;C23C14/08;C23C14/34;C23C14/38;C23C28/00;(IPC1-7):B05D3/00 |
主分类号 |
C23C14/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|