| 摘要 |
An easy to use scanning probe instrument such as a microscope or memory device is provided with a probe which does not require optical alignment. The scanning probe is a cantilever probe adapted to undergo relative movement with respect to an object such as a sample or a recording media. Optical interference and/or displacement of the cantilever probe caused by interaction with the object while the probe is being scanned across the object is measured to determine characteristics of the object. The cantilever probe has a base member, a cantilever formed in the base member, at least a portion of the cantilever being elastically deflectable to enable the cantilever to be displaced in a given direction. A waveguide extends through the base member and has one end surface disposed proximate the cantilever, the one end surface being positioned perpendicularly with respect to the given direction of displacement of the cantilever and being spaced from the cantilever by a distance sufficient to allow displacement of the cantilever by a desired amount in the given direction. |
