ILLUMINATOR OF WAFER IDENTIFIER MARK READER

摘要

PURPOSE: An illuminator of a wafer identifier mark reader is provided to enhance the rate of reading by enlarging adjustment scope thereof. CONSTITUTION: A lamp(1) generates light(2) used for reading the identifier mark(8) formed on a wafer(7). A photo cable receives light(2) generated from the lamp(2) at a receiving part(3) and then transmits light to a mount(6). The mount(6) spreads horizontally the photo cable so that light can be thrown onto the identifier mark(8). The photo cable is covered with the first and the second protection layers(4,5). The first protection layer(4) has flexibility allowing lateral movement of the photo cable. The second protection layer(5) makes the photo cable move vertically and laterally, and also makes the photo cable be fixed once moves. The first and second protection layers(4,5) serve to freely adjust output points of the illuminator.