发明名称 MANUFACTURING METHOD FOR TRANSPARENT CONDUCTIVE OXIDE THIN FILM
摘要 PROBLEM TO BE SOLVED: To provide a transparent conductive oxide thin film enabling the control of composition without the need for the control of an expensive vacuum device and a precise manufacturing condition. SOLUTION: In the manufacturing method for a metallic oxide thin film, a base plate is coated with a solution of a polymer metal complex constituted in such a manner that a polymer ligand undergoes coordination with metal for the purpose of allowing a coated film to undergo burning.
申请公布号 JP2002042583(A) 申请公布日期 2002.02.08
申请号 JP20000226627 申请日期 2000.07.27
申请人 NICHIA CHEM IND LTD 发明人 KUBO TOMOYA;MAKINO KENYA
分类号 B05D3/02;B05D5/12;C01G19/00;C23C18/12;H01B13/00;(IPC1-7):H01B13/00 主分类号 B05D3/02
代理机构 代理人
主权项
地址