发明名称 SHEET STORAGE BOX
摘要 <p>PROBLEM TO BE SOLVED: To remarkably reduce a working amount without requiring labor drying a device sheet when the device sheet is stored. SOLUTION: A sheet storage box 1 arranges a sheet storing chamber C for storing a single device sheet W2 at a plurality of positions in a plane, each sheet storage chamber C is opened upward, and fluid circulation openings 15, 18 are provided. The bottom wall of each sheet storage chamber C is swollen downward, each swelling part of the sheet storage box positioned at an upper stage when it is stacked is fitted to the open opening of each sheet storage chamber of the sheet storage box positioned at a lower stage to close them.</p>
申请公布号 JP2002043403(A) 申请公布日期 2002.02.08
申请号 JP20000226688 申请日期 2000.07.27
申请人 DAIDO STEEL CO LTD 发明人 KAWAI TAKAAKI;SHINOHARA WATARU;SAITO KATSUTOSHI;KATSUMI MASATAKA
分类号 G11B5/31;H01L21/673;H01L21/68;(IPC1-7):H01L21/68 主分类号 G11B5/31
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