发明名称 Gate transistor, used in DRAM storage cell for PCs, comprises gate arranged on substrate, source arranged next to first edge of gate, and drain arranged next to second edge of gate
摘要 A gate transistor comprises a gate (203) arranged on a substrate (201); a source (205) arranged next to the first edge of the gate and formed by introducing a first type of dopant of the n-type into the substrate; and a drain (207) arranged next to the second edge of the gate and formed by introducing a second type of dopant of the n-type into the substrate. An independent claim is also included for a storage cell comprising a storage capacitor having upper and lower nodes, and a gate transistor. Preferred Features: The first type of dopant of the n-type is phosphorus and the second type of dopant of the n-type is arsenic. The concentration of arsenic in the drain is 1018> - 1021> /cm3>.
申请公布号 DE10035439(A1) 申请公布日期 2002.02.07
申请号 DE20001035439 申请日期 2000.07.20
申请人 PROMOS TECHNOLOGIES, INC. 发明人 CHU, YU-PING;HSIEH, JA-RONG
分类号 H01L21/02;H01L21/8242;H01L27/108;(IPC1-7):H01L29/78 主分类号 H01L21/02
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