| 摘要 |
PURPOSE: A plasma generating apparatus is provided to prevent failure such as cracks and fractures and leakage of cooling medium due to the thermal deterioration of a discharge tube. CONSTITUTION: A structure of a plasma generating apparatus of high-frequency discharge type includes a first cylindrical discharge tube element(11) of metal material, positioned at the middle of the vertical direction, a second cylindrical discharge tube element(12) of metal material, positioned at the upper side of the vertical direction, a third cylindrical discharge tube element(13) of metal material, positioned at the lower side of the vertical direction, connecting flanges(11a,11b) conjoined integrally to top end and bottom end portions of a middle first discharge tube element(11), a connecting flange(12a) conjoined integrally to bottom end of a second discharge tube element(12), a connecting flange(13a) conjoined integrally to a top end of a third discharge tube element(13), insulators for forming a discharge gap and vacuum-sealing, discharge gaps(16,17), a gas induction port(12b) for plasma, a plasma discharge port(13b), a flange(13c) for mounting to a device, O-rings(18,19,20,21), cooling medium flow inlet tubes(22a,23a,24a), cooling medium flow path of water jacket type(22b,23b,24b), cooling medium flow outlet tubes(22c,23c,24c) and a high-frequency power supply(25).
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