Vorrichtung zum Behandeln von Substraten,申请号DE1999134300-传众专利搜索

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发明名称	Vorrichtung zum Behandeln von Substraten
摘要
申请公布号	DE19934300(C2)	申请公布日期	2002.02.07
申请号	DE1999134300	申请日期	1999.07.21
申请人	STEAG MICROTECH GMBH;IMEC, LEUVEN	发明人	SPEH, ULRICH;SCHNEIDER, JENS;MEURIS, MARC
分类号	B08B3/12;H01L21/00;H01L21/304;(IPC1-7):H01L21/306	主分类号	B08B3/12
代理机构		代理人
主权项
地址

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