Method and system for testing an electrical component

摘要

The invention relates to a method and a system for testing an electrical component comprising the steps of positioning a primary particle beam (1) onto the component (3), supplying an AC-signal to an electrode (2) being positioned in front of the component (3) and varying the frequency of the AC-signal, detecting secondary particles (5) released at the component (3) and penetrating the electrode (2) to form a secondary particle signal (6), and evaluating the corresponding secondary particle signal.