| 摘要 |
PROBLEM TO BE SOLVED: To provide a humidity sensor in which dew formation is suppressed. SOLUTION: A sensor element 2, comprising a humidity sensing film 3 and a humidity sensor electrode 4, is formed on the side of one surface 1a of a substrate 1, a heating element 5 is formed at a section opposing to the humidity- sensing film 3 via the substrate 1, and heating element electrodes 6 are formed at the ends of the heating element 5. In the heating element 5, the ultimate temperature is previously determined, so as to maintain the humidity sensor 10 at constant temperature equal to the highest dew point conceivable, in using environments during the operation of the heating element 5.
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