| 摘要 |
PROBLEM TO BE SOLVED: To provide a static pressure bearing capable of increasing the rigidity and accuracy of a stage device which moves with high speed and accuracy inside a vacuum chamber. SOLUTION: The static pressure bearing 1 has a bearing surface 1a with a compressed air outlet, and an exhaust groove 2 for collecting compressed air spit out of the outlet is formed around the bearing surface. Further, an evacuation groove 3 is formed around the exhaust groove. In particular, the size of clearance between the bearing surface and a supporting surface 4a is greater than the size of clearance among a first surface 1c between the exhaust groove and the evacuation groove, a second surface 1d located outside of the evacuation groove, and the supporting surface.
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