PROBE CARD

摘要

PROBLEM TO BE SOLVED: To provide a probe card conformable to a measuring matter chip such as a miniaturized, highly dense and highly integrated present-day LSI chip. SOLUTION: This probe card used for the measurement of electric characteristics of an LSI chip 900 that is the measuring matter comprises a main board 200 having a main conductive pattern 210 formed thereon; a probe 100 having a contact part 110 to make contact with the electrode pad 910 of the LSI chip 900 at the tip and a sharpened connection part 120 at the rear end; a sub-board 300 interposed between the probe 100 and the main board 200 and having a sub-conductive pattern 310 for connecting the probe 100 to the main conductive pattern 210 of the main board 200; and a conductive spring 400 to be fitted to a via hole 320 opened in the sub-board 300 for exposing one end 312 of the sub-conductive pattern 310 and brought into contact with the one end 312. The connection part 120 at the rear end of the probe 100 is connected to the spring 400.