| 摘要 |
PROBLEM TO BE SOLVED: To provide a device and a method for data acquisition in film thickness measurement which can minimize memory capacity and a recording medium stored with a program for the data acquisition. SOLUTION: A sample 6 and an objective 5 are relatively moved and the sample 6 is irradiated with laser light through the objective 5 to detect variation of luminance data corresponding to the reflected light from the sample 6; and the peak position of the detected variation of the luminance data is detected and a detection area including the peak position is determined. As for the determined detection area, the sample 6 and objective 5 are relatively moved, the sample 6 is irradiated with laser light through the objective 5, and the absolute coordinates of the position where the luminance data corresponding to the reflected light from the sample 6 becomes maximum is stored as height information in a memory 43.
|
