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发明名称
摘要
申请公布号
JP2002503877(A)
申请公布日期
2002.02.05
申请号
JP20000516377
申请日期
1998.10.16
申请人
发明人
分类号
H01L27/14;H01L27/146;H01L29/06;H01L31/0352;H01L31/10;H01L31/11;(IPC1-7):H01L31/10
主分类号
H01L27/14
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