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发明名称
THERMAL CVD OF TaN FILMS FROM TANTALUM HALIDE PRECURSORS
摘要
申请公布号
KR20020010611(A)
申请公布日期
2002.02.04
申请号
KR1020017013564
申请日期
2001.10.23
申请人
发明人
分类号
H01L21/205
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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