APPARATUS FOR MEASURING SUBSTRATE TEMPERATURE AND METHOD FOR FABRICATING THE SAME

摘要

PURPOSE: An apparatus for measuring a substrate temperature and a method for fabricating the same are provided to measure a substrate temperature by using a substrate temperature measurement device having the same surface as the substrate. CONSTITUTION: A thin film thermal sensor(3) is formed on a trench(5) of a silicon substrate(1) for measuring temperature. The trench(5) of the silicon substrate(1) for measuring temperature is formed by using a photo etch process and a silicon etch process. A protective silicon substrate(2) is used for protecting the thin film thermal sensor(3) from a process atmosphere. A thermocouple pad(4) is used for connecting a compensative conductive line(6) with the silicon substrate(1), electrically. The thermocouple pad(4) is formed on the silicon substrate(1) for measuring temperature. The silicon substrate(1) for measuring temperature is closely contacted with the protective silicon substrate(2).