发明名称 |
APPARATUS FOR MANUFACTURING PLASMA DISPLAY PANEL AND METHOD THEREOF |
摘要 |
PURPOSE: An apparatus for manufacturing plasma display panel and method thereof are provided to reduce required time for product manufacturing process and prevent deterioration of panel characteristic and performance and damage to a panel. CONSTITUTION: An apparatus for manufacturing plasma display panel comprises a top substrate protection film forming chamber(71) for forming MgO protection film on a top substrate, a substrate transfer chamber(72) of two layers for transferring the top substrate received from the top substrate protection film forming chamber(71) and a bottom substrate to a next block without exposure to the air, pre-align chamber(73) for pre-aligning the top and the bottom substrates from the substrate transfer chamber(72) by using a first align robot, cleaning chamber(74) for removing impurity from the pre-aligned substrates and performing vacuum state exhaustion, sealing material applying chamber(75) for applying sealing material onto the top substrate, a discharge gas injection/sealing and discharge gas recovery chamber(76) for aligning accurately and sealing the substrates by using a second align robot and recovering discharge gas, and a panel unloading chamber(77) for unloading the panel.
|
申请公布号 |
KR20020009274(A) |
申请公布日期 |
2002.02.01 |
申请号 |
KR20000042854 |
申请日期 |
2000.07.25 |
申请人 |
LG ELECTRONICS INC. |
发明人 |
LEE, MI GYEONG;LEE, WON JEONG;LIM, JUN YONG;YANG, NAM YEOL |
分类号 |
H01J9/24;(IPC1-7):H01J9/24 |
主分类号 |
H01J9/24 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|