发明名称 METHOD AND DEVICE FOR CONVEYING SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To convey products by the shortest path in a clean room. SOLUTION: A conveyance robot traveling along rails selects the shortest or almost the shortest route for automatic traveling. In this case, the rails are suspended from the ceiling of the clean room that is a semiconductor- manufacturing line and are arranged, while the rails intersect longitudinally laterally, and diagonally.
申请公布号 JP2002033371(A) 申请公布日期 2002.01.31
申请号 JP20000218578 申请日期 2000.07.19
申请人 MITSUBISHI ELECTRIC CORP 发明人 EGUCHI KOJI
分类号 B66C7/00;G05D1/02;H01L21/677;H01L21/68;(IPC1-7):H01L21/68 主分类号 B66C7/00
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